二氯二氢硅
Dichlorosilane 二氯二氢硅（SiH2Cl2）
Total Purity 纯度≥99.7%
气相杂质Vapor Phase Impurities
|
Contaminants杂质 |
Specifications规格 |
|
|
Inert gases |
惰性气体 |
＜1000ppm |
|
Monochlorosilane |
一氯甲硅烷 |
＜800ppm/w |
|
Trichlorosilane |
三氯氢硅 |
＜2000ppm/w |
|
Silicon Tetrachloride |
四氯化硅 |
＜300ppm/w |
|
Carbon |
碳 |
＜0.05ppm/w |
|
Aluminium |
铝 |
＜0.04ppm/w |
|
Arsenic |
砷 |
＜0.03ppm/w |
|
Boron |
硼 |
＜0.02ppm/w |
|
Lron |
铁 |
＜3ppb/w |
|
Phsophorus |
磷 |
＜0.05ppb/w |
|
O |
氧 |
＜1ppm |
|
Resistivity |
电阻系数 |
＞400 ohm-cm |
包装规格Standard Package Information
|
Cylinder Type气瓶规格 |
44L |
|
Fill Weight充装量 |
90/50/10 |
|
Valve Connection阀门 |
CGA-678 |
