硅烷
Silane 硅烷（SiH4）
Total Purity 纯度≥99.9999%
气相杂质Vapor Phase Impurities
|
Contaminants杂质 |
Specifications（ppm）规格 |
|
|
O2+Ar |
Oxygen+Argon氧氩 |
＜0.05 |
|
Total Chlorosilane |
Total Chlorosilane总氯硅烷 |
＜0.15 |
|
Disilane |
Disilane乙硅烷 |
＜0.5 |
|
CO2 |
Carbon Dioxide二氧化碳 |
＜0.05 |
|
CO |
Carbon Monoxide一氧化碳 |
＜0.05 |
|
He |
Helium氦气 |
＜1 |
|
N2 |
Nitrogen氮气 |
＜1 |
|
H2 |
Hydrogen氢 |
＜20 |
|
O2 |
Oxygen氧 |
＜0.05 |
|
CH4 |
Methane甲烷 |
＜0.05 |
|
Carbon |
Carbon碳 |
＜0.2 |
|
Disiloxane |
Disiloxane二硅氧烷 |
＜0.5 |
|
Methylsilane |
Methylsilane甲基硅烷 |
＜0.5 |
|
As |
Arsenic砷 |
＜0.005ppb |
|
B |
Boron硼 |
＜0.02ppb |
|
P |
Phosphorus磷 |
＜0.02ppb |
|
K |
Potassium钾 |
＜10 |
|
Resistivity |
Resistivity电阻系数 |
＞10000ohm-cm |
|
H2O |
Moisture水 |
＜0.5 |
包装规格Standard Package Information
|
Cylinder Type气瓶规格 |
47L、Ton-cylinder、20ft ISO-Container、40ft ISO-Container |
|
Fill Weight充装量 |
10kg、100kg、2000kg、4000kg |
|
Valve Connection阀门 |
JIS22L、CGA-632、CGA-350 |
